CMI 760配置包括:
CMI700主機(jī)及證書
SRP-4面銅探頭
SRP-4探頭替換用探針(1個(gè))
NIST的校驗(yàn)用SRP標(biāo)準(zhǔn)片及證書
ETP孔銅探頭
NIST的校驗(yàn)用ETP標(biāo)準(zhǔn)片及證書SRP-4面銅探頭測試技術(shù)參數(shù):
銅厚測量范圍:
化學(xué)銅:0.25μm - 12.7μm(10μin - 500μin)
電鍍銅:2.5μm - 254μm(0.1mils - 10mils)
線性銅線寬范圍:203μm - 7620μm(8mil - 300mil)
準(zhǔn)確度:±1%(±1μm)參考標(biāo)準(zhǔn)片
度:化學(xué)銅:標(biāo)準(zhǔn)差0.2%,電鍍銅:標(biāo)準(zhǔn)差0.3%
分辨率:0.1μm≥10μm,0.01μm<10μm,0.001μm<1μm,0.01mils≥1mil,0.001mils<1milETP孔銅探頭測試技術(shù)參數(shù):
可測孔小直徑:Φ0.899m(35mils)
孔徑范圍:0.899m - 3.0m
厚度范圍:2μm - 102μm(0.08 - 4.0mils)
準(zhǔn)確度:±0.01mils(0.25μm)<1mil(25μm)
度:1.2milS時(shí),1%(實(shí)驗(yàn)室情況下)
分辨率:0.01mils(0.25μm)






