- 產(chǎn)品品牌：
- Tencor
- 產(chǎn)品型號(hào)：
- Tencor 2908
Flexus 2908, Wafer Testing & Metrology
Manufacture: KLA-Tencor
Model#: Flexus 2908
Description:Wafer Testing & Metrology
Spesifications:Dual wavelength technology MS Windows based software
Temperatures: Up to 900C
Wafer size: 125mm-200mm
Power: 230v, 50/60Hz
Tool primarily used for calculation of biaxial modulus of elasticity and linear expansion
Water diffusion coefficient in dielectric films Linear regression and stress-temp or stress-time gradients
Description:
900 deg C Thin Film Stress Measurement System. Provides accurate analysis of thin film stress with very low measurement noise. Allows observation and quantitative evaluation of stress relaxation, oxide densification, thin film phase transformations and annealing. Scan range user programmable up to 200mm. Wafer Sizes: 125, 150, 200mm. 230V, 1 Ph, 60 Hz, 30A.
